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MPX2010

10 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors

Freescale Semiconductor 

Maximum Ratings

Table 2. Maximum Ratings(1)

Rating

Symbol

Value

Maximum Pressure (P1 > P2)

Burst Pressure (P1 > P2)

Storage Temperature

Operating Temperature

PMAX

PBURST

TSTG

TA

75

100

–40 to +125

–40 to +125

1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

Pressure

Unit

kPa

kPa

°C

°C

Voltage Output versus Applied Differential Pressure

The output voltage of the differential or gauge sensor

increases with increasing pressure applied to the pressure

side (P1) relative to the vacuum side (P2). Similarly, output

voltage increases as increasing vacuum is applied to the

vacuum side (P2) relative to the pressure side (P1).

VS

3

Figure 1. shows a block diagram of the internal circuitry on

the stand-alone pressure sensor chip.

Sensing

Element

Thin Film

Temperature

Compensation

and Calibration

Circuitry

2

+VOUT

4 –VOUT

1

GND

Figure 1. Temperature Compensated and Calibrated

Pressure Sensor Schematic

Sensors

Freescale Semiconductor

MPX2010

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