Description
The FS1012 MEMS mass flow sensor module measures the flow rate using the thermo-transfer (calorimetric) principle. The FS1012 is capable of measuring a gas or liquid medium.
The FS1012 offers key advantages over resistor-based flow solutions. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio. The sensor comprises a “solid” thermal isolation technology and silicon-carbide coating to protect it from abrasive wear and provides robustness and long-term reliability. In comparison, other sensors typically contain a fragile membrane above an etched cavity for the thermal isolation base.
The FS1012 features the sensor fully assembled and wire-bonded out to a 6-pin header.

FEATUREs
◾ Gas or liquid mediums
◾ Robust “solid” isolation technology
◾ Resistant to surface contamination
◾ No cavity to cause clogging
◾ Resistant to vibration and pressure shock
◾ Low power application
◾ Sensitive at low flow rates and differential pressure levels
◾ Fast response: 2ms
◾ Millivolt output
◾ Supply voltage: 3V to 5V
◾ Module operating temperature range: 0°C to +85°C

Typical Applications
◾ Process controls and monitoring
◾ Oil and gas leak detection
◾ HVAC and air control systems
◾ CPAP and respiratory devices
◾ Automotive mas air flow meter
◾ Liquid dispensing system