[Silicon Microstructures, Inc.]

DESCRIPTION
The SM5103 is a silicon micro-machined, piezoresistive low pressure sensing chip. These devices are available in full-scale ranges from 0.3 to 3.0 PSI and are ideal for OEM and high-volume applications.

FEATURES
➤ Low Pressure Ranges from 0-0.3 PSI to 0-1.5 PSI
➤ High Performance at Low Pressures
➤ Constant Current or Constant Voltage Drive
➤ High Sensitivity Output
➤ Ratiomatric with Supply Voltage up to 10 V

APPLICATIONS
➤ Air Flow
➤ Liquid Level Detection
➤ HVAC
➤ Respiratory Equipment
➤ Gas Analysis
➤ Engine Control / Exhaust Gas Recirculation (EGR)
➤ Hospital Beds
➤ Seat Contour Controls